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ESD Neutrals from Chemisorbed and Physisorbed Species: Angular and Energy Distributions
Abstract Methods based on ordinary mass spectrometers equipped with electron impact ionizers to record angular and energy distributions of neutrals desorbed by electron stimulation are described. Data from chemisorbed and physisorbed adsorbates are presented. The results from chemisorbed layers are interpreted in a MGR framework, whereas data from physisorbed species can be understood assuming that desorption takes place via an Antoniewicz mechanism.
ESD Neutrals from Chemisorbed and Physisorbed Species: Angular and Energy Distributions
Abstract Methods based on ordinary mass spectrometers equipped with electron impact ionizers to record angular and energy distributions of neutrals desorbed by electron stimulation are described. Data from chemisorbed and physisorbed adsorbates are presented. The results from chemisorbed layers are interpreted in a MGR framework, whereas data from physisorbed species can be understood assuming that desorption takes place via an Antoniewicz mechanism.
ESD Neutrals from Chemisorbed and Physisorbed Species: Angular and Energy Distributions
Feulner, P. (author)
1985-01-01
10 pages
Article/Chapter (Book)
Electronic Resource
English
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