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Reverse osmosis for semiconductor processing facilities
Cleanliness is the essence of successful semiconductor processing. The acceptance of this is reflected in the capital expenditure allocated to cleanrooms and water treatment plant in all semiconductor manufacturing establishments of note. Reverse osmosis has become the accepted method of water pretreatment prior to final polishing.
Reverse osmosis for semiconductor processing facilities
Cleanliness is the essence of successful semiconductor processing. The acceptance of this is reflected in the capital expenditure allocated to cleanrooms and water treatment plant in all semiconductor manufacturing establishments of note. Reverse osmosis has become the accepted method of water pretreatment prior to final polishing.
Reverse osmosis for semiconductor processing facilities
Umgekehrte Osmose fuer Halbleiterfabriken
Spencer, N.E. (author)
Microelectronics and Reliability ; 4 ; 36-38
1973
3 Seiten, 1 Tabelle
Article (Journal)
English
WASSER , WASSERAUFBEREITUNG , REINIGUNG , HERSTELLUNG , OSMOSE , REINHEIT , KOSTEN , STOFF (WERKSTOFF)
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