A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Ultrapure water and reverse osmosis technology
While the classical technology for water purification continues to have certain limitations, the new concept of treatment plants incorporating the reverse osmosis process has proved to be capable of producing water of greater purity. This article evaluates the attributes of the new technology, points out the problem areas experienced in the field and discusses the contribution of reverse osmosis to the state-of-art in production of high-purity water. Operating results of two water treatment systems representing the two technologies (classical and RO) are compared from the standpoint of product water purity and its effect on fabrication of various generations of semiconductor devices. It is suggested that the old concept of what constitutes ultrapure water may have to be reinvestigated in the era of LSI devices.
Ultrapure water and reverse osmosis technology
While the classical technology for water purification continues to have certain limitations, the new concept of treatment plants incorporating the reverse osmosis process has proved to be capable of producing water of greater purity. This article evaluates the attributes of the new technology, points out the problem areas experienced in the field and discusses the contribution of reverse osmosis to the state-of-art in production of high-purity water. Operating results of two water treatment systems representing the two technologies (classical and RO) are compared from the standpoint of product water purity and its effect on fabrication of various generations of semiconductor devices. It is suggested that the old concept of what constitutes ultrapure water may have to be reinvestigated in the era of LSI devices.
Ultrapure water and reverse osmosis technology
Erzeugung von ultrareinem Wasser durch umgekehrte Osmose
Kohout, R. (author)
Solid State Technology ; 17 ; 60-65
1974
6 Seiten, 4 Bilder, 2 Tabellen, 14 Quellen
Article (Journal)
English
An Autopsy Study of a Fouled Reverse Osmosis Membrane Used for Ultrapure Water Production
| DOAJ | 2019
Reverse osmosis water purifying system
Elsevier | 1988
Status of sea water reverse osmosis membrane process technology
| Tema Archive | 1976
Reverse Osmosis Makes Water a Treat
Online Contents | 1993