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Microfiltration of high purity deionised water

Carbonel, B.

Results are presented of experimental studies conducted on a new type of filtration cartridge which is used for colloidal matter removal from the deionised water used for silicon wafer rinsing, in the microelectronics industry. This new filtration cartridge is made of classical pleated cartridges around which has been injected a thin layer of cation and anion microresins, so-called macroreticular resins. This association of microresins and filters, in the same cartridge allows the user to obtain filtration throughputs and water qualities never reached by classical filters.

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Microfiltration of high purity deionised water

Carbonel, B.

Results are presented of experimental studies conducted on a new type of filtration cartridge which is used for colloidal matter removal from the deionised water used for silicon wafer rinsing, in the microelectronics industry. This new filtration cartridge is made of classical pleated cartridges around which has been injected a thin layer of cation and anion microresins, so-called macroreticular resins. This association of microresins and filters, in the same cartridge allows the user to obtain filtration throughputs and water qualities never reached by classical filters.

Microfiltration of high purity deionised water

Carbonel, B.

Results are presented of experimental studies conducted on a new type of filtration cartridge which is used for colloidal matter removal from the deionised water used for silicon wafer rinsing, in the microelectronics industry. This new filtration cartridge is made of classical pleated cartridges around which has been injected a thin layer of cation and anion microresins, so-called macroreticular resins. This association of microresins and filters, in the same cartridge allows the user to obtain filtration throughputs and water qualities never reached by classical filters.

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Title:

Microfiltration of high purity deionised water

Additional title:

Mikrofilterung von hochreinem entionisiertem Wasser

Contributors:

Carbonel, B. (author)

Published in:

Microelectronics Journal ; 10 ; 13-17

Publication date:

1979

Size:

5 Seiten, 7 Bilder, 2 Tabellen

ISSN:

DOI:

https://doi.org/10.1016/S0026-2692(79)80057-9

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Keywords:

DATENDURCHSATZ , FILTER (STOFFTRENNUNG) , REINHEIT , REINIGUNG , WASSER , WASSERAUFBEREITUNG , IONISATION , KOLLOID , SILICIUM , WAFER (HALBLEITERPLAETTCHEN) , MIKROELEKTRONIK , DUENNE SCHICHT , KATION , ANION , HARZ , MASCHENNETZ , ROHR , FILTRIEREN

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