A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Optimization of a cantilever microswitch with piezoelectric actuation
This paper considers MEMS microswitchcs with piezoelectric-film actuation. A mathematical actuator model is established that accounts for normal stress at the piezo-substrate interface, in addition to shear stress. This model gives more accurate predictions for relatively thicker piezoelectric layers. Maintaining adequate contact force between switch electrodes is important in ohmic-contact switches, but parallel contact geometry is also important in switches that provide capacitive coupling between the signal lines. Furthermore, 'off-state' isolation is governed by electrode gap when open. The presented mathematical model demonstrates the relationships between these factors and the switch geometry. Optimum conditions are derived.
Optimization of a cantilever microswitch with piezoelectric actuation
This paper considers MEMS microswitchcs with piezoelectric-film actuation. A mathematical actuator model is established that accounts for normal stress at the piezo-substrate interface, in addition to shear stress. This model gives more accurate predictions for relatively thicker piezoelectric layers. Maintaining adequate contact force between switch electrodes is important in ohmic-contact switches, but parallel contact geometry is also important in switches that provide capacitive coupling between the signal lines. Furthermore, 'off-state' isolation is governed by electrode gap when open. The presented mathematical model demonstrates the relationships between these factors and the switch geometry. Optimum conditions are derived.
Optimization of a cantilever microswitch with piezoelectric actuation
Chen, X. (author) / Fox, C.H.J. (author) / McWilliam, S. (author)
Journal of Intelligent Material Systems and Structures ; 15 ; 823-834
2004
12 Seiten, 15 Quellen
Article (Journal)
English
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