A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Materials compatibility with nitrogen trifluoride (NF3)
NF3 (nitrogen trifluoride) is a widely used electronic specialty gas and is considered about 1.5 times more oxidising than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF3 to develop several test systems and materials compatibility data for the most common metals and nonmetals utilised in NF3 transfer systems. This paper presents the data developed by the industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF3. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their AIT (autogenous ignition temperature) and NF3-index for sustained combustion.
Materials compatibility with nitrogen trifluoride (NF3)
NF3 (nitrogen trifluoride) is a widely used electronic specialty gas and is considered about 1.5 times more oxidising than gaseous oxygen. A recent test program was sponsored by seven companies that are heavily involved in the worldwide industrial distribution and use of NF3 to develop several test systems and materials compatibility data for the most common metals and nonmetals utilised in NF3 transfer systems. This paper presents the data developed by the industry steering group on the compatibility of 12 metallic materials and 15 nonmetallic materials with NF3. The flammability of metallic materials were evaluated by their promoted combustion threshold pressure and the nonmetallic materials were evaluated by their AIT (autogenous ignition temperature) and NF3-index for sustained combustion.
Materials compatibility with nitrogen trifluoride (NF3)
Newton, Barry E. (author) / Chiffoleau, Gwenael J.A. (author)
2006
16 Seiten, 9 Bilder, 9 Tabellen, 5 Quellen
Conference paper
English
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