A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Advanced oxidation process for TOC removal in ultra pure water system
Methods to efficiently remove TOC (total organic carbon) from recovered waste water at semiconductor manufacturing factories were investigated, and the authors succeeded in developing a thermo-chemical oxidation process that can facilitate the TOC decomposition reaction by utilizing sodium persulfate as an oxidizing agent and by increasing the reaction temperature to 130 deg C. This method is capable of IPA (isopropyl alcohol) dissolved-raw water containing 10ppm TOC to less than 10ppb TOC in less than 5 minutes. When other organic substances, as well as IPA, were processed using this method, more than 99 % of all major organic reagents and natural organic substances included in city water were decomposed and eliminated. By employing a high-efficiency heat exchanger, TOC decomposition using the thermo-chemical oxidation process can be performed more safely and energy-efficient, and when compared with conventional method, this new system is more compact in size. Furthermore, when a demineralizer was connected after the reactor, high purity primary pure water could be produced. This new oxidation method is suitable for removing TOC from recovered waste water as well as for removing TOC from industrial water.
Advanced oxidation process for TOC removal in ultra pure water system
Methods to efficiently remove TOC (total organic carbon) from recovered waste water at semiconductor manufacturing factories were investigated, and the authors succeeded in developing a thermo-chemical oxidation process that can facilitate the TOC decomposition reaction by utilizing sodium persulfate as an oxidizing agent and by increasing the reaction temperature to 130 deg C. This method is capable of IPA (isopropyl alcohol) dissolved-raw water containing 10ppm TOC to less than 10ppb TOC in less than 5 minutes. When other organic substances, as well as IPA, were processed using this method, more than 99 % of all major organic reagents and natural organic substances included in city water were decomposed and eliminated. By employing a high-efficiency heat exchanger, TOC decomposition using the thermo-chemical oxidation process can be performed more safely and energy-efficient, and when compared with conventional method, this new system is more compact in size. Furthermore, when a demineralizer was connected after the reactor, high purity primary pure water could be produced. This new oxidation method is suitable for removing TOC from recovered waste water as well as for removing TOC from industrial water.
Advanced oxidation process for TOC removal in ultra pure water system
Oxidationsprozeß zur TOC-Entfernung im Reinstwassersystem
Morita, H. (author) / Obata, Y. (author) / Koizumi, M. (author)
SPWCC, Semiconductor Pure Water and Chemicals Conference, 1996 ; 15, Rec ; 53-67
1996
15 Seiten, 5 Bilder, 4 Tabellen
Conference paper
English
Screening and application of domestic boron removal resin for ultra-pure water system
| DOAJ | 2024
Ultra-pure water; a new utility
| Tema Archive | 1974
Ultra-Pure Water: The Production Systems
| Tema Archive | 1973
Advanced Oxidation Processes for Removal of Emerging Contaminants in Water
| DOAJ | 2023