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A new bistable microvalve using and SiO2 beam as the movable part
A new bi-stable electrostatic microvalve using a silicon dioxide beam as the valve plate has been investigated. The buckling of a released silicon dioxide beam, which is fixed at bith ends, due to residual stress at an Si-SiO2 interface is used to open or close the orifice of the microvalve. The microvalve plate is made of a very thinly chromium coated oxide beam which is electrostatically buckled up to open and buckled down to close the valve port. Various beams have been successfully fabricated for valves with port areas ranging from 10 x 10 micron 2 to 100 x 100 micron2. It can be applied to rarefied gas control systems such as those desired in semiconductor equipment. This paper presents the operating principles, mathematical model, fabrication and preliminary experimental results of the microvalve.
A new bistable microvalve using and SiO2 beam as the movable part
A new bi-stable electrostatic microvalve using a silicon dioxide beam as the valve plate has been investigated. The buckling of a released silicon dioxide beam, which is fixed at bith ends, due to residual stress at an Si-SiO2 interface is used to open or close the orifice of the microvalve. The microvalve plate is made of a very thinly chromium coated oxide beam which is electrostatically buckled up to open and buckled down to close the valve port. Various beams have been successfully fabricated for valves with port areas ranging from 10 x 10 micron 2 to 100 x 100 micron2. It can be applied to rarefied gas control systems such as those desired in semiconductor equipment. This paper presents the operating principles, mathematical model, fabrication and preliminary experimental results of the microvalve.
A new bistable microvalve using and SiO2 beam as the movable part
Ein neues bistabiles Mikroventil mit SiO2-Platte als bewegliches Teil
Haji Babaei, J. (author) / Huang, R.S. (author) / Kwok, C.Y. (author)
1994
4 Seiten, 6 Bilder, 9 Quellen
Conference paper
English
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