Developments in surface contamination and cleaning: Fid-Bau Portal

Developments in surface contamination and cleaning

Volume three. Methods for removal of particle contaminants.

Kohli, Rajiv / Mittal, K. L.

Aqueous Methods -- Megasonic Cleaning -- Hydrodynamic Removal of Particles -- Brush Cleaning -- Laser Methods for Cleaning -- CO 2 Pellet Cleaning -- Cleaning Using Acoustic Fields -- Precision Cleaning Using Cluster Beams -- Electrostatic Methods for Cleaning -- Wipers for Cleaning -- Projectile Cleaning

The contributions in this volume cover methods for removal of particle contaminants on surfaces. Several of these methods are well established and have been employed in industrial applications for a long time. However, the ever- higher demand for removal of smaller particles on newer substrate materials is driving continuous development of the established cleaning methods and alternative innovative methods for particle removal. This book provides information on the latest developments in this topic area. The purpose of the Developments in Surface Contamination and Cleaning series is to provide a state-of-the-art guide to the current knowledge of the behaviour of film-type and particulate surface contaminants, and cleaning methods. Each title has a particular topical focus, covering the key techniques and recent developments in the area. Taken as a whole, the series forms a unique reference for professionals and academics working in the area of surface contamination and cleaning. A strong theme running through the series is that of surface contamination and cleaning at the micro and nano scales. Covers the latest techniques in areas such as removal of nanoparticles, especially important in the semiconductor industry, disk drives and microelectronics. The series as a whole represents the definitive reference on Surface Contamination and Cleaning An essential reference for industries where cleaning is critical: electronics, optics, pharmaceutical manufacturing, etc