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    Measurement technology for micro-nanometer devices

    New search for: Zhang, Wendong

    Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.

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    Measurement technology for micro-nanometer devices

    New search for: Zhang, Wendong

    Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.

    Access

    To UB Braunschweig
    Check availability in my library
    Order at Subito €

    Measurement technology for micro-nanometer devices

    New search for: Zhang, Wendong

    Geometry Measurements at the Micro/Nanoscale -- Dynamic Measurements at the Micro/Nanoscale -- Mechanical Characteristics Measurements -- SPM for MEMS/NEMS Measurements -- MEMS Online Measurements -- Typical Micro/Nanoscale Device Measurements.

    Access

    To UB Braunschweig
    Check availability in my library
    Order at Subito €

    Access

    To UB Braunschweig
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Measurement technology for micro-nanometer devices

    Contributors:

    Zhang, Wendong (author)

    Publication date:

    2017

    Size:

    1 Online-Ressource (1 online resource)

    Remarks:

    Includes bibliographical references and index

    ISBN:

    1118717996 , 1118717988 , 111871797X , 9781118717981 , 9781118717974 , 9781118717998 , 1118717961 , 9781118717967

    DOI:

    https://doi.org/10.1002/9781118717974

    Type of media:

    Book

    Type of material:

    Electronic Resource

    Language:

    English

    Keywords:

    Nanotechnology , Physical measurements , Microelectromechanical systems , Microtechnology

    Classification:

    DDC:  681/.2

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