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Laser surface processing of thin films for microelectronics applications [2498-01]
Laser surface processing of thin films for microelectronics applications [2498-01]
Laser surface processing of thin films for microelectronics applications [2498-01]
Takai, M. (Autor:in) / Prokhorov, A. M. / Pustovoy, V. I. / General Physics Institute; Moscow / Konstanz University
International conference on Advanced laser technologies, Laser methods of surface treatment and modification ; 1994 ; Constance; Germany
01.01.1995
9 pages
Also known as ALT'94
Aufsatz (Konferenz)
Englisch
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