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    Laser surface processing of thin films for microelectronics applications [2498-01]

    New search for: Takai, M.
    New search for: Prokhorov, A. M.
    New search for: Pustovoy, V. I.
    New search for: Konstanz University

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    Laser surface processing of thin films for microelectronics applications [2498-01]

    New search for: Takai, M.
    New search for: Prokhorov, A. M.
    New search for: Pustovoy, V. I.
    New search for: Konstanz University

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Laser surface processing of thin films for microelectronics applications [2498-01]

    New search for: Takai, M.
    New search for: Prokhorov, A. M.
    New search for: Pustovoy, V. I.
    New search for: Konstanz University

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
    Similar titles

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    Document information
    Title:

    Laser surface processing of thin films for microelectronics applications [2498-01]

    Contributors:

    Takai, M. (author) / Prokhorov, A. M. / Pustovoy, V. I. / General Physics Institute; Moscow / Konstanz University

    Conference:

    International conference on Advanced laser technologies, Laser methods of surface treatment and modification ; 1994 ; Constance; Germany

    Published in:

    Laser methods of surface treatment and modification ; 2-10

    PROCEEDINGS- SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING

    Publication date:

    1995-01-01

    Size:

    9 pages

    Remarks:

    Also known as ALT'94

    ISBN:

    0819418552

    ISSN:

    0361-0748

    Type of media:

    Conference paper

    Type of material:

    Print

    Language:

    English

    Keywords:

    advanced laser technologies , ALT , laser methods , surface treatment

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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