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Excimer-laser-induced chemical vapor deposition of boron nitride films from borazine [2547-37]
Excimer-laser-induced chemical vapor deposition of boron nitride films from borazine [2547-37]
Excimer-laser-induced chemical vapor deposition of boron nitride films from borazine [2547-37]
Ugarov, M. V. (Autor:in) / Ageev, V. P. (Autor:in) / Konov, V. I. (Autor:in) / Hicks, J. M. / Ho, W. / Dai, H.-L. / SPIE
Conference, Laser techniques for surface science II ; 1995 ; San Diego; CA
01.01.1995
7 pages
Aufsatz (Konferenz)
Englisch
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