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Integrated five-degrees-of-freedom piezoelectric micromanipulator [2717-69]
Integrated five-degrees-of-freedom piezoelectric micromanipulator [2717-69]
Integrated five-degrees-of-freedom piezoelectric micromanipulator [2717-69]
Ferreira, A. (Autor:in) / Minotti, P. (Autor:in) / Le Moal, P. (Autor:in) / Femiot, J.-C. (Autor:in) / Chopra, I. / SPIE
Conference, Smart structures and integrated systems ; 1996 ; San Diego; CA
01.01.1996
12 pages
Held as part of Smart structures and materials 1996
Aufsatz (Konferenz)
Englisch
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