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Integrated five-degrees-of-freedom piezoelectric micromanipulator [2717-69]
Integrated five-degrees-of-freedom piezoelectric micromanipulator [2717-69]
Integrated five-degrees-of-freedom piezoelectric micromanipulator [2717-69]
Ferreira, A. (author) / Minotti, P. (author) / Le Moal, P. (author) / Femiot, J.-C. (author) / Chopra, I. / SPIE
Conference, Smart structures and integrated systems ; 1996 ; San Diego; CA
1996-01-01
12 pages
Held as part of Smart structures and materials 1996
Conference paper
English
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