Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment [3044-25]
Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment [3044-25]
Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment [3044-25]
Kajiwara, K. (Autor:in) / Hayatu, M. (Autor:in) / Imaoka, S. (Autor:in) / Fujita, T. (Autor:in) / Sater, J. M. / SPIE
Meeting, Industrial and commercial applications of smart structures technologies ; 1997 ; San Diego; CA
01.01.1997
12 pages
Held as part of Smart structures and materials 1997
Aufsatz (Konferenz)
Englisch
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