A platform for research: civil engineering, architecture and urbanism
A platform for research: civil engineering, architecture and urbanism
Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment [3044-25]
Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment [3044-25]
Application of large-scale active microvibration control system using piezoelectric actuators to semiconductor manufacturing equipment [3044-25]
Kajiwara, K. (author) / Hayatu, M. (author) / Imaoka, S. (author) / Fujita, T. (author) / Sater, J. M. / SPIE
Meeting, Industrial and commercial applications of smart structures technologies ; 1997 ; San Diego; CA
1997-01-01
12 pages
Held as part of Smart structures and materials 1997
Conference paper
English
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