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Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
Thubthimthong, B. (Autor:in) / Lau, G.K. (Autor:in) / Matham, M.V. (Autor:in) / Vincenzini, P. / Lorenzelli, L.
Symposium, Next generation micro/nano systems; of CIMTEC 2012 ``Smart materials, structures and systems'' ; 2012 ; Montecatini Terme, Italy
01.01.2013
6 pages
Includes bibliographical references and index
Aufsatz (Konferenz)
Englisch
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