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Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
Rectilinear Electrothermal Actuator Using High-Aspect-Ratio Micromachined Composite of SU-8 and Silicon
Thubthimthong, B. (author) / Lau, G.K. (author) / Matham, M.V. (author) / Vincenzini, P. / Lorenzelli, L.
Symposium, Next generation micro/nano systems; of CIMTEC 2012 ``Smart materials, structures and systems'' ; 2012 ; Montecatini Terme, Italy
2013-01-01
6 pages
Includes bibliographical references and index
Conference paper
English
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