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Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors
Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors
Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors
Foulon, F. (Autor:in) / Lehmann, O. (Autor:in) / Stuke, M. (Autor:in)
APPLIED SURFACE SCIENCE ; 69 ; 87
01.01.1993
87 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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