Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors: Fid-Bau Portal

Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors

Foulon, F. / Lehmann, O. / Stuke, M.

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Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors

Foulon, F. / Lehmann, O. / Stuke, M.

Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors

Foulon, F. / Lehmann, O. / Stuke, M.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Laser direct-write Al deposition on Si, GaAs and diamond from trialkylamine-alane precursors

Contributors:

Foulon, F. (author) / Lehmann, O. (author) / Stuke, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 69 ; 87

Publication date:

1993-01-01

Size:

87 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 621.35

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