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Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses
Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses
Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses
Osorio, S. P. A. (Autor:in) / Montero, I. (Autor:in) / Perriere, J. (Autor:in) / Martinez-Duart, J. M. (Autor:in)
APPLIED SURFACE SCIENCE ; 70/71 ; 772
01.01.1993
772 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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