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    Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses

    New search for: Osorio, S. P. A.
    New search for: Montero, I.
    New search for: Perriere, J.
    New search for: Martinez-Duart, J. M.

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    Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses

    New search for: Osorio, S. P. A.
    New search for: Montero, I.
    New search for: Perriere, J.
    New search for: Martinez-Duart, J. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses

    New search for: Osorio, S. P. A.
    New search for: Montero, I.
    New search for: Perriere, J.
    New search for: Martinez-Duart, J. M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of annealing on the composition of PECVD borosilicate and borophosphosilicate glasses

    Contributors:

    Osorio, S. P. A. (author) / Montero, I. (author) / Perriere, J. (author) / Martinez-Duart, J. M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 70/71 ; 772

    Publication date:

    1993-01-01

    Size:

    772 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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