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The influence of oxygen partial pressure on the properties of DC reactive magnetron sputtered titanium oxide films
The influence of oxygen partial pressure on the properties of DC reactive magnetron sputtered titanium oxide films
The influence of oxygen partial pressure on the properties of DC reactive magnetron sputtered titanium oxide films
Meng, L.-J. (Autor:in) / Dos Santos, M. P. (Autor:in)
APPLIED SURFACE SCIENCE ; 68 ; 319
01.01.1993
319 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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