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Study of the effect of the oxygen partial pressure on the properties of rf reactive magnetron sputtered tin-doped indium oxide films
Study of the effect of the oxygen partial pressure on the properties of rf reactive magnetron sputtered tin-doped indium oxide films
Study of the effect of the oxygen partial pressure on the properties of rf reactive magnetron sputtered tin-doped indium oxide films
Meng, L.-J. (Autor:in) / Dos Santos, M. P. (Autor:in)
APPLIED SURFACE SCIENCE ; 120 ; 243-249
01.01.1997
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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