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Changes induced in the secondary electron emission properties of tantalum nitride by Ar^+ bombardment and oxygen exposure
Changes induced in the secondary electron emission properties of tantalum nitride by Ar^+ bombardment and oxygen exposure
Changes induced in the secondary electron emission properties of tantalum nitride by Ar^+ bombardment and oxygen exposure
Prieto, P. (Autor:in) / Galan, L. (Autor:in) / Sanz, J. M. (Autor:in)
APPLIED SURFACE SCIENCE ; 70/71 ; 186
01.01.1993
186 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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