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Changes induced in the secondary electron emission properties of tantalum nitride by Ar^+ bombardment and oxygen exposure
Changes induced in the secondary electron emission properties of tantalum nitride by Ar^+ bombardment and oxygen exposure
Changes induced in the secondary electron emission properties of tantalum nitride by Ar^+ bombardment and oxygen exposure
Prieto, P. (author) / Galan, L. (author) / Sanz, J. M. (author)
APPLIED SURFACE SCIENCE ; 70/71 ; 186
1993-01-01
186 pages
Article (Journal)
Unknown
DDC:
621.35
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