On the use of a O2:SF6 plasma treatment on GaAs processed surfaces for molecular beam epitaxial regrowth

Desplats, O. / Gallo, P. / Doucet, J. B. et al. | British Library Online Contents | 2009

Ion Beam Induced Epitaxial Regrowth and Interfacial Amorphization of Compound Semiconductors

Glaser, E. / Fehlhaber, T. / Schulz, R. et al. | British Library Online Contents | 1997

Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry

Hummel, R. E. | British Library Online Contents | 1998

MBE regrowth of GaAs/AlGaAs structures on RIE patterned substrates

Roehr, T. / Walther, M. / Rochus, S. et al. | British Library Online Contents | 1993

Boron activation and redistribution during thermal treatments after solid phase epitaxial regrowth

Aboy, M. / Pelaz, L. / Barbolla, J. et al. | British Library Online Contents | 2005