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Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry
Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry
Implantation damage and epitaxial regrowth of silicon studied by differential reflectometry
Hummel, R. E. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- A ; 253 ; 50-61
01.01.1998
12 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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