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Structure and morphology of titanium nitride films deposited by laser-induced chemical vapour deposition
Structure and morphology of titanium nitride films deposited by laser-induced chemical vapour deposition
Structure and morphology of titanium nitride films deposited by laser-induced chemical vapour deposition
Silvestre, A. J. (Autor:in) / Conde, O. (Autor:in) / Vilar, R. (Autor:in) / Jeandin, M. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 404
01.01.1994
404 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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