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Structure and morphology of titanium nitride films deposited by laser-induced chemical vapour deposition
Structure and morphology of titanium nitride films deposited by laser-induced chemical vapour deposition
Structure and morphology of titanium nitride films deposited by laser-induced chemical vapour deposition
Silvestre, A. J. (author) / Conde, O. (author) / Vilar, R. (author) / Jeandin, M. (author)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 404
1994-01-01
404 pages
Article (Journal)
Unknown
DDC:
620.11
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