Passivation of semiconductors by the remote plasma technique

Kulisch, W. / Kiel, F. / Schiller, M. et al. | British Library Online Contents | 1995

Surface passivation of III-V compound semiconductors with chalcogen atoms

Oigawa, H. / Shigekawa, H. / Nannichi, Y. | British Library Online Contents | 1995

RF plasma treatment of shallow ion-implanted layers of germanium

Okholin, P.N. / Glotov, V.I. / Nazarov, A.N. et al. | British Library Online Contents | 2016

Shallow defect states in hydrogenated amorphous silicon oxide

Lin, S. Y. | British Library Online Contents | 2002

Relaxation phenomena in keV-ion implanted hydrogenated amorphous silicon carbide

Musumeci, P. / Calcagno, L. / Makhtari, A. | British Library Online Contents | 1998