Eine Plattform für die Wissenschaft: Bauingenieurwesen, Architektur und Urbanistik
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Laser-induced hydrogen desorption from polysilane and its application to silicon pattern generation
Laser-induced hydrogen desorption from polysilane and its application to silicon pattern generation
Laser-induced hydrogen desorption from polysilane and its application to silicon pattern generation
Okamoto, K. (Autor:in) / Shinohara, M. (Autor:in) / Yamanishi, T. (Autor:in) / Miyazaki, S. (Autor:in)
APPLIED SURFACE SCIENCE ; 79/80 ; 57
01.01.1994
57 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
621.35
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