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Laser-induced hydrogen desorption from polysilane and its application to silicon pattern generation
Laser-induced hydrogen desorption from polysilane and its application to silicon pattern generation
Laser-induced hydrogen desorption from polysilane and its application to silicon pattern generation
Okamoto, K. (author) / Shinohara, M. (author) / Yamanishi, T. (author) / Miyazaki, S. (author)
APPLIED SURFACE SCIENCE ; 79/80 ; 57
1994-01-01
57 pages
Article (Journal)
Unknown
DDC:
621.35
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