Excimer laser reactive ablation deposition of silicon nitride films

D'Anna, E. / Leggieri, G. / Luches, A. et al. | British Library Online Contents | 1995

Carbon nitride films deposited by reactive laser ablation

De Giorgi, M. L. / Leggieri, G. / Luches, A. et al. | British Library Online Contents | 1998

Laser reactive ablation deposition of silicon carbide films

Leggieri, G. / Luches, A. / Martino, M. et al. | British Library Online Contents | 1996

Deposition of C-N films by reactive laser ablation

D'Anna, E. / Luches, A. / Perrone, A. et al. | British Library Online Contents | 1996

Copper nitride films produced by reactive pulsed laser deposition

Soto, G. / Diaz, J. A. / de la Cruz, W. | British Library Online Contents | 2003