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Deposition of niobium silicide thin films from hexachlorodisilane and niobium pentachloride
Deposition of niobium silicide thin films from hexachlorodisilane and niobium pentachloride
Deposition of niobium silicide thin films from hexachlorodisilane and niobium pentachloride
Cheng, W. S. (Autor:in) / Lee, C. Y. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 13 ; 1204
01.01.1994
1204 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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