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Morphology modification by high energy ion beam bombardment concurrent with TiN film growth
Morphology modification by high energy ion beam bombardment concurrent with TiN film growth
Morphology modification by high energy ion beam bombardment concurrent with TiN film growth
Wang, X. (Autor:in) / Martin, P. (Autor:in)
JOURNAL OF MATERIALS SCIENCE LETTERS ; 13 ; 1317
01.01.1994
1317 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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