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Influence of Ar+ Energy of Bombardment Cu Target and Low Energy Assisted Bombardment on Cu-W Thin Film Structure by Ion Beam Sputtering
Influence of Ar+ Energy of Bombardment Cu Target and Low Energy Assisted Bombardment on Cu-W Thin Film Structure by Ion Beam Sputtering
Influence of Ar+ Energy of Bombardment Cu Target and Low Energy Assisted Bombardment on Cu-W Thin Film Structure by Ion Beam Sputtering
Ai, Y.P. (Autor:in) / Zeng, Y.Y. (Autor:in) / Liu, L.J. (Autor:in) / Huang, X.M. (Autor:in) / Zhou, T.P. (Autor:in) / Zhu, G.
Advanced Materials and Computer Science ; 448-453
KEY ENGINEERING MATERIALS ; 474/476
01.01.2011
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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