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Anisotropic etching of silicon crystals in KOH solution. Part I Experimental etched shapes and determination of the dissolution slowness surface
Anisotropic etching of silicon crystals in KOH solution. Part I Experimental etched shapes and determination of the dissolution slowness surface
Anisotropic etching of silicon crystals in KOH solution. Part I Experimental etched shapes and determination of the dissolution slowness surface
Tellier, C. R. (Autor:in) / Brahim-Bounab, A. (Autor:in)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 5953
01.01.1994
5953 pages
Aufsatz (Zeitschrift)
Unbekannt
DDC:
620.11
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