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Anisotropic etching of silicon crystals in KOH solution. Part I Experimental etched shapes and determination of the dissolution slowness surface
Anisotropic etching of silicon crystals in KOH solution. Part I Experimental etched shapes and determination of the dissolution slowness surface
Anisotropic etching of silicon crystals in KOH solution. Part I Experimental etched shapes and determination of the dissolution slowness surface
Tellier, C. R. (author) / Brahim-Bounab, A. (author)
JOURNAL OF MATERIALS SCIENCE ; 29 ; 5953
1994-01-01
5953 pages
Article (Journal)
Unknown
DDC:
620.11
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