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Scratch-Related Effects on Silicon Surface
Scratch-Related Effects on Silicon Surface
Scratch-Related Effects on Silicon Surface
Shreter, Y. G. (Autor:in) / Rebane, Y. T. (Autor:in) / Tarhin, D. V. (Autor:in) / Cherns, D. (Autor:in) / Steeds, J. W. (Autor:in)
MATERIALS SCIENCE FORUM ; 1231-1236
01.01.1995
6 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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