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Scratch-Related Effects on Silicon Surface

Shreter, Y. G. / Rebane, Y. T. / Tarhin, D. V. / Cherns, D. / Steeds, J. W.

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Scratch-Related Effects on Silicon Surface

Shreter, Y. G. / Rebane, Y. T. / Tarhin, D. V. / Cherns, D. / Steeds, J. W.

Scratch-Related Effects on Silicon Surface

Shreter, Y. G. / Rebane, Y. T. / Tarhin, D. V. / Cherns, D. / Steeds, J. W.

Access

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Check availability in my library

Order at Subito €

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Document information

Title:

Scratch-Related Effects on Silicon Surface

Contributors:

Shreter, Y. G. (author) / Rebane, Y. T. (author) / Tarhin, D. V. (author) / Cherns, D. (author) / Steeds, J. W. (author)

Published in:

MATERIALS SCIENCE FORUM ; 1231-1236

Publication date:

1995-01-01

Size:

6 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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