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Causes of cracking of vacuum deposited thick amorphous silicon film
Causes of cracking of vacuum deposited thick amorphous silicon film
Causes of cracking of vacuum deposited thick amorphous silicon film
Avrutin, V. S. (Autor:in) / Izumskaya, N. F. (Autor:in) / Hartman, Y. M. (Autor:in) / Andreeva, A. V. (Autor:in) / Vyatkin, A. F. (Autor:in) / Mehlik, N. N. (Autor:in)
MATERIALS SCIENCE AND ENGINEERING -LAUSANNE- B ; 39 ; 21-24
01.01.1996
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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