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Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy
Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy
Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy
Lee, J. C. (Autor:in) / Jeong, C. S. (Autor:in) / Kang, H. J. (Autor:in) / Kim, H. K. (Autor:in) / Moon, D. W. (Autor:in)
APPLIED SURFACE SCIENCE ; 99 ; 97-101
01.01.1996
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
621.35
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Damage profiling of Ar^+ sputtered Si(100) surface by medium energy ion scattering spectroscopy
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