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Depth Profiling of Al Ion-Implantation Damage in SiC Crystals by Cathodoluminescence Spectroscopy
Depth Profiling of Al Ion-Implantation Damage in SiC Crystals by Cathodoluminescence Spectroscopy
Depth Profiling of Al Ion-Implantation Damage in SiC Crystals by Cathodoluminescence Spectroscopy
Mitani, T. (Autor:in) / Hattori, R. (Autor:in) / Yoshikawa, M. (Autor:in)
MATERIALS SCIENCE FORUM ; 600/603 ; 615-618
01.01.2009
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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