Ultrahigh vacuum system for atomic-scale planarization of 6 inch Si(001) substrate

Idota, K. / Niwa, M. / Sumita, I. | British Library Online Contents | 1996

Abrasive-Free Planarization of 3-Inch 4H-SiC Substrate Using Catalyst-Referred Etching

Okamoto, T. / Sano, Y. / Tachibana, K. et al. | British Library Online Contents | 2011

Physical principles of ultrahigh vacuum atomic layer epitaxy

Herman, M. A. | British Library Online Contents | 1997

Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009

Damage-Free Planarization of 2-Inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution

Okamoto, T. / Sano, Y. / Hara, H. et al. | British Library Online Contents | 2009