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Preparation of zirconia thin films by metalorganic chemical vapor deposition using ultrasonic nebulization
Preparation of zirconia thin films by metalorganic chemical vapor deposition using ultrasonic nebulization
Preparation of zirconia thin films by metalorganic chemical vapor deposition using ultrasonic nebulization
Kim, D.-Y. (Autor:in) / Lee, C.-H. (Autor:in) / Soon Ja Park (Autor:in)
JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 2583-2587
01.01.1996
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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