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    Preparation of zirconia thin films by metalorganic chemical vapor deposition using ultrasonic nebulization

    New search for: Kim, D.-Y.
    New search for: Lee, C.-H.
    New search for: Soon Ja Park

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    Preparation of zirconia thin films by metalorganic chemical vapor deposition using ultrasonic nebulization

    New search for: Kim, D.-Y.
    New search for: Lee, C.-H.
    New search for: Soon Ja Park

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation of zirconia thin films by metalorganic chemical vapor deposition using ultrasonic nebulization

    New search for: Kim, D.-Y.
    New search for: Lee, C.-H.
    New search for: Soon Ja Park

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Preparation of zirconia thin films by metalorganic chemical vapor deposition using ultrasonic nebulization

    Contributors:

    Kim, D.-Y. (author) / Lee, C.-H. (author) / Soon Ja Park (author)

    Published in:

    JOURNAL OF MATERIALS RESEARCH -PITTSBURGH- ; 11 ; 2583-2587

    Publication date:

    1996-01-01

    Size:

    5 pages

    ISSN:

    0884-2914

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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