Surface reaction control in digital etching of GaAs by using a tunable UV laser system: reaction control mechanism in layer-by-layer etching

Ishii, M. / Meguro, T. / Sugano, T. et al. | British Library Online Contents | 1995

Study of Etch Rate and Surface Roughness in Chemical Etching of Stainless Steel

Cakir, O. | British Library Online Contents | 2008

Digital etching of GaAs

Meguro, T. / Aoyagi, Y. | British Library Online Contents | 1997

Fabrication of submicron relief gratings in p-GaAs in the process of maskless holographic wet etching by laser-induced etch rate reduction method [2403-29]

Khudobenko, A. I. / Panchenko, V. Y. / Seminogov, V. N. et al. | British Library Conference Proceedings | 1995

Control of the etching reaction of digital etching using tunable UV laser irradiation

Meguro, T. / Ishii, M. / Sugano, T. et al. | British Library Online Contents | 1994