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Plasma preconditioning of sapphire substrate for GaN epitaxy
Plasma preconditioning of sapphire substrate for GaN epitaxy
Plasma preconditioning of sapphire substrate for GaN epitaxy
Heinlein, C. (Autor:in) / Grepstad, J. (Autor:in) / Riechert, H. (Autor:in) / Averbeck, R. (Autor:in) / Aulombard, R. L. / Cavenett, B. C. / Gil, B. / Triboulet, R.
01.01.1997
5 pages
Aufsatz (Zeitschrift)
Englisch
DDC:
620.11
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